On the new potentials of ellipsometry arising from the null optical circuit. Ellipsometry of real surface structures. 7. Determination of bulk material optical constants. Method for successive non-destructive recovery of the surface optical profile

Methods for solving a mathematically incorrect inverse problem are considered. A new criterion for selecting the optimal solution is suggested; the method has been successfully tested in a numerical experiment. Based on the numerical experiment results, a method for successive non-destructive recovery of the surface optical profile has been suggested. The new criterion was also used to determine parameters of super-thin oxide films on silicon; the results obtained were physically reasonable.