On the new potentials of ellipsometry arising from the null optical circuit. Ellipsometry of real surface structures. 8. Ellipsometry of anisotropic mediums. Method of generalized measurement zones
Автор: Semenenko A.I., Semenenko I.A.
Журнал: Научное приборостроение @nauchnoe-priborostroenie
Рубрика: Исследования, приборы, модели и методы анализа
Статья в выпуске: 2 т.17, 2007 года.
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The goal of this paper is to describe step by step the method of "zero" ellipsometry of anisotropic mediums. Peculiarities and methods for their elimination within the scope of the instrument generalized measurement zones technique are considered. The paper presents general provisions of the matrix method in the field of anisotropic lamellar medium optics; the case of a monoaxial crystal with an arbitrary orientation of the optical axis is considered in details; ultimate situations with different optical axis orientations are analyzed. Using the matrix method and a new, more natural, representation of the common field in the substrate, complex amplitude reflection factors were reconsidered; those factors are used to derive basic equations of anisotropic medium ellipsometry; the behavior of two plane waves in an anisotropic substrate in the process of turning to the "isotropic" case are analyzed. In addition, analysis of the inverse ellipsometry problem peculiar features for anisotropic mediums has been performed.
Короткий адрес: https://sciup.org/14264482
IDR: 14264482