On the new potentials of ellipsometry arising from the null optical circuit. Ellipsometry of real surface structures. 9. On controllability and stabilizability of the ellipsometer phase compensator parameters
Автор: Semenenko A.I., Semenenko I.A.
Журнал: Научное приборостроение @nauchnoe-priborostroenie
Рубрика: Оригинальные статьи
Статья в выпуске: 3 т.17, 2007 года.
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The goal of the paper is to study an ideal phase compensator with the Jones diagonal matrix. We have proposed a method of optical alignment that ensures, if the mechanism of spatial orientation is available, a conversion into the ideal compensator. Equations for complex parameter ρ (real parameters δ and f) that determines the ideal compensator Jones matrix have been derived. In this connection, a four-dimensional matrix of a homogeneous anisotropic layer for the case of arbitrary orientation of two main axes in the light ray plane of incidence has been analyzed. The paper considers methods for controlling the basic phase parameter δ, including those for temperature stabilization and varying this parameter by changing the light ray angle of incidence onto the compensator plate.
Короткий адрес: https://sciup.org/14264502
IDR: 14264502