On the new potentials of ellipsometry arising from the null optical circuit. Ellipsometry of real surface structures. 14. Interzoned disorder of polarization angles as metrological criterion. Influence of different factors

The problem of a "" ellipsometry connected with the straggling of polarization angles Δ and Ψ on measuring bands observed in the experiment is discussed. Such factors as errors in the assignment of parameters of a phase compensator and superficial anisotropy of samples were analyzed. Certainly these are not the only factors. The urgency of this problem is determined by the use of possibility of interzone straggling of Δ and Ψ angles as a new metrological criterion a "" ellipsometry. Taking into account superficial anisotropy factor requires more detailed consideration of the extended zone relations of anisotropic media ellipsometry. This is also one of the problems of the present work. As to heterogeneity of the catopter caused also by the presence of the broken surface layer, its study by interzone disorder of polarization angles is another problem of great interest. It is a problem of surface metrology.