On the new potentials of ellipsometry arising from the null optical circuit. Ellipsometry of real surface structures. 15. Metrology of the null ellipsometry. Factor of the optical alignment of the phase compensator

The questions concerning procedure of an optical alignment of a phase compensator of an ellipsometer are discussed. Features of such alignment are studied. The equations allowing essentially to simplify process of definition of all three complex parameters of the compensator are obtained. Procedure for optical calibration of the nonuniform compensator is suggested.