On the new potentials of ellipsometry arising from the null optical circuit. Ellipsometry of real surface structures. 16. Metrology of the null ellipsometry. Methods for determination of complete set of phase compensator complex parameters

The work describes methods for determination of the phase compensator three complex parameters ρ, ρ1 and ρ2. One of these is based only on positioning procedures and suggests rather expressed imperfection of the compensator, which is due to the appreciable difference of the small parameters ρ1 and ρ2 from . Another method is a combined approach when both positioning procedures and invariants of ellipsometry of isotropic media are used. The process of optical calibration of the non-uniform compensator using both methods is described in details.