On the new potentials of ellipsometry arising from the null optical circuit. Ellipsometry of real surface structures. 18. Metrology of the null ellipsometry. On experimental evaluation of device optic elements

The work is devoted to the generalization of the combined approach to the definition of the compensator parameters. It includes generalization of Jones procedure for matrix construction of non-ideal compensator, the process of device measuring configuration setting, and also calibrator procedures intended for the determination of linear relations between ρ, ρ1 and ρ2 compensator parameters. It was shown that within the limits of the generalized combined approach not only heterogeneity but also errors of its limb have no principal significance. In this case it is also possible to secure normal work of the devices using proper procedures. Equivalence of all possible variants of compensator position at the given device configuration was proved. The experimental part of the work presents the method of practical use of the generalized combined approach.