Feasibility and practical supplement of solution methods for mathematically incorrect inverse problem of ellipsometry. 1. Towards an understanding of Brewster angle for solution of inverse problem. General properties and complex selection of the angles of incidence of light beam
Автор: Semenenko A.I., Semenenko I.A.
Журнал: Научное приборостроение @nauchnoe-priborostroenie
Рубрика: Поверхность
Статья в выпуске: 4 т.22, 2012 года.
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In this work the impact analysis of kits for the angles of incidence of mathematically incorrect inverse problem of ellipsometry. It’s shown that the existence only one kit of the angles of incidence, on which the correct passage to the limit towards the ideal situation is realized, and the noticeable scatter of optimal values d opt and n opt of the film parameters in accordance with the angular complexes of some multitude of these complexes isn’t the factor limiting the method’s possibilities. Besides, the similar general properties of angular complexes lead to the additional possibilities of solution method for the mathematically incorrect inverse problem. The role of Brewster angle in formation used complexes of the angles of incidence for solution of the inverse problem also is considered
Ellipsometry, polarization angles, mathematically incorrect inverse problem, criterion, optimum solution, numerical experiment, superthin film, ground, optical constants
Короткий адрес: https://sciup.org/14264823
IDR: 14264823