Feasibility and practical supplement of solution methods for mathematically incorrect inverse problem of ellipsometry. 2. On solution of inverse problem on multiple set of light beam angle of incidence

The method for the mathematically incorrect inverse task of ellipsometry, based on the use of some set of sets angles of incidence of a light bunch on the sample is considered is discussed. It was shown, that the solution of the inverse task on set of angles of incidence results in a relative simplicity and reliability of the process of solution, and also to increased accuracy with which all four parameters of reflecting system with a super thin film are defined. The offered method of the solution allows to overcome the essential difficulties arising, because of a midget thickness of a film, and in an ideal case when there are no experimental errors, but the traditional approach to the solution of an inverse problem concerning all 4 parameters of single-layered reflecting system is used.