Review of constructions of turbomolecular pumps with various types of molecular steps
Автор: Shostak Y.A., Mishustin V.A., Nikulin N.K.
Журнал: Теория и практика современной науки @modern-j
Рубрика: Математика, информатика и инженерия
Статья в выпуске: 5 (23), 2017 года.
Бесплатный доступ
In the article various designs of existing turbomolecular pumps are considered. Designs of hybrid turbomolecular pumps with molecular stages of various types are presented. Examples of constructions with the molecular step of Gede, Holvek, Siegbahn, and the vortex step are given. Prospects for the development of turbomolecular pumps are outlined and directions for development are formulated.
Vacuum pump, turbomolecular pump, molecular pump, gede pump, molecular mode, holvec pump, siebban pump
Короткий адрес: https://sciup.org/140271466
IDR: 140271466
