Estimation of the metallization parameters influence on the performance of surface acoustic waves components

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The results of studying the influence of the interdigital transducers electrode structure parameters on the main characteristics of surface acoustic waves (SAW) in YZ-cut lithium niobate substrates are presented. As a result of numerical analysis, estimates of the influence of the metallization coefficient and the relative thickness of metallization on the value of the effective wave velocity and reflection coefficient were obtained. The results received can be used to optimize the design of SAW-based acoustoelectronic components.

Acoustoelectronics, metallization, surface acoustic waves, piezoelectricity, filters

Короткий адрес: https://sciup.org/146282841

IDR: 146282841

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