The sizing of diameter monitoring signal correction on crystal meniscus bump height change at contact monitoring method of monocrystal growth by Czochralski method

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In the contact monitoring method of diameter of monocrystalline ingot pulled from melt by Czochralsky method developed by the authors, sizing of diameter monitoring signal correction on crystal meniscus bump height change when growing conical part of crystal is important.

Короткий адрес: https://sciup.org/148175138

IDR: 148175138

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