The prospect of the development of a new type of a molecular vacuum pump of the disc type

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A brief overview of the existing molecular mechanical vacuum pumps. Considers the relevance of new types of vacuum equipment, namely, a new form of a molecular vacuum pump. Comparison to similar designs. The possibility to use existing methods of calculation.

Vacuum, vacuum pump, molecular vacuum pump, high vacuum, vacuum technology, production characterization

Короткий адрес: https://sciup.org/140271458

IDR: 140271458

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