Correction to calculate the intensity of reflexes during small-angle x-ray study of flat micro and nanoelements at different tilt angles

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The analysis of geometry of small-angle X-ray experiment is carried out in case of research of micro and nanoelements of modern equipment and electronics. Dependence of intensity of diffraction peaks from slope angle of flat unit is shown and the formula of their correction is received.

Small-angle x-ray experiment, multilayers, diffraction peaks, mesogen molecules, nanoelectronic

Короткий адрес: https://sciup.org/148186083

IDR: 148186083

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