Use the optical encoders in SPM microscanners with a large range of scanning
Автор: Golubok А.О., Gorbenko О.М., Dvoretskih A.V., Kotov V.V., Sapozhnikov I.D., Felshtyn M.L.
Журнал: Научное приборостроение @nauchnoe-priborostroenie
Рубрика: Приборы, исследования, методики
Статья в выпуске: 2 т.19, 2009 года.
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The work introduces the construction of piezoceramic-scanner with optical linear encoders and the results of researches in the field of this scanner implementation for the scanning probe microscope with large scanning range. Algorithms are discussed and the results of piezoceramic-scanner calibration and linearization are given. Decrease of thermodrift influence on the SPM-image is demonstrated.
Scanning probe microscopy, optical linear encoders, microscanner, piezoceramic element, linear displacement
Короткий адрес: https://sciup.org/14264593
IDR: 14264593
