Design of high aperture confocal diffractive objectives
Автор: Greysukh Grigoriy Isaevitch, Ezhov Eugeniy Grigorievich, Levin Ilya Anatolievich, Stepanov Sergei Alekseevich
Журнал: Компьютерная оптика @computer-optics
Рубрика: Дифракционная оптика, оптические технологии
Статья в выпуске: 1 т.35, 2011 года.
Бесплатный доступ
The possibilities of correction of monochromatic aberrations of high aperture confocal diffractive objectives are investigated. Potential possibilities of these objectives for deep ultra-violet lithography are compared to possibilities of refractive objectives. It is shown, that comparable characteristics at diffractive objectives are reached at essentially smaller quantity of lenses.
Diffractive lens, refractive lens, paraxial design, correction of aberrations, confocal objective, telecetntric ray tracing, deep ultra-violet lithography
Короткий адрес: https://sciup.org/14058985
IDR: 14058985
