Development of porous structures on silicon
Автор: Sakun Elena A., Polyushkevich Anna V., Harlashin Pavel A., Semenova Olga V., Korets Anatoly Ya.
Журнал: Журнал Сибирского федерального университета. Серия: Техника и технологии @technologies-sfu
Статья в выпуске: 4 т.3, 2010 года.
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In this article the review of experimental researches of the porous silicon structures received by electrochemical anodizing method of monocrystal silicon in fluoric acid solution is resulted. Optical and magnetic researches of porous structures are obtained.
Porous silicon, porous structures on silicon, microsystem engineering
Короткий адрес: https://sciup.org/146114553
IDR: 146114553
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