Working out of the way of manufacturing of non-planar substrates for new generation of photovoltaic cells
Автор: Kondratenko T.T., Maksimov P.V.
Журнал: НБИ технологии @nbi-technologies
Рубрика: Технические инновации
Статья в выпуске: 6, 2012 года.
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A structure of an external lateral surface of single-crystals of silicon after etching in gas atmosphere H2 + 2 %об.HCl at high temperature had been researched.It is established that as a result of etching on a lateral surface of the silicon single-crystal cylindrical substrates which have been grown up in a direction , the periodic relief consisting of steps, by depth 0.1-5 microns, length to 50 microns is formed.
Silicon, crystal, substrate, etching, photovoltaic, semiconductor
Короткий адрес: https://sciup.org/14968232
IDR: 14968232