The development of the coatings technology application radioreflective coatings
Автор: Miheev Anatoly Egorovich, Girn Alexey Vasiljevich, Harlamov V.A., Chernyatina Anastasiya Alexandrovna, Homenko I.I.
Журнал: Сибирский аэрокосмический журнал @vestnik-sibsau
Рубрика: Технологические процессы и материалы
Статья в выпуске: 4 (50), 2013 года.
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The multi-layer coating technology of radioreflective coating by magnetron sputtering is developed. The results of the process of surface preparation for coating, the results of measuring of the deposition rate of layers of SiO 2 and Al, the resistivity of the aluminum film which depends on the conditions and deposition conditions are given. The basic technological modes of deposition of the coating layers are defined.
Radioreflective coating, vacuum deposition, plasma-supporting gas
Короткий адрес: https://sciup.org/148177149
IDR: 148177149
