Evolution of ellipsometry
Автор: Dron O.S.
Журнал: Научное приборостроение @nauchnoe-priborostroenie
Рубрика: 25 лет институту аналитического приборостроения РАН
Статья в выпуске: 4 т.12, 2002 года.
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A summary of ellipsometer development results and theoretical approaches at IAI RAS for the last few years is given. Metrological capalilitiers and application areas are considered. Examples of analysis of the new method for evaluating measured parameters and defining their errors taking into account correlation are demonstrated and compared with that for existing methods.
Короткий адрес: https://sciup.org/14264260
IDR: 14264260
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