Development of the molecular-beam epitaxy technique at the institute for analytical instrumentation RAS

In this paper the history of designing molecular-beam epitaxy systems of the EP class in Russia is reviewed. The scientific results on the theoretical and experimental studies of the epitaxial growth in the laboratory for epitaxial technologies at the Institute for Analytical Instrumentation RAS during 1993-1999 are presented. An efficient and fast system for visualisation, input into the computer and analysis of reflection high-energy electron diffraction patterns and the system for automation of the epitaxial growth processes are described. The trends and perspectives of further exploring the equipment and technological approaches in molecular-beam epitaxy are given.