REGULATION OF HYDROPHILIC-HYDROPHOBIC PROPERTIES OF SILICON WAFERS
Автор: V. E. Kurochkin, S. V. Mjakin, N. A. Bubis, L. M. Kuznetzov, A. Y. Shmykov
Журнал: Научное приборостроение @nauchnoe-priborostroenie
Рубрика: Физика и химия приборостроения
Статья в выпуске: 4 т.32, 2022 года.
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The possibility of a wide range of adjustment of hydrophilic-hydrophobic properties of silicon wafers is demonstrated by means of treatment with hydrofluoric acid, Caro's acid, and various concentrations of hydrogen peroxide solutions. By measuring the contact angles of wetting and calculating the total, polar and dispersive components of the surface energy, it has been found that the most significant hydrophilization of the silicon surface as well as the maximum increase in the surface energy is achieved when the surfice is treated with Caro’s acid, while consecutive processing with Caro’s acid and hydrofluoric acid leads to the most prominent hydrophobization and a decrease in the surface energy
Silicon, surface energy, hydrophilicity, Caro’s acid, hydrofluoric acid, hydrogen peroxide
Короткий адрес: https://sciup.org/142235501
IDR: 142235501 | DOI: 10.18358/np-32-4-i310