Relaxation of internal - mechanical stresses as a result of ultra-high frequency processing test structure Pt-n-n + GaAs
Автор: Bekbergenov S.E., Bazarbaeva F.M.
Журнал: Теория и практика современной науки @modern-j
Рубрика: Основной раздел
Статья в выпуске: 6 (72), 2021 года.
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The article discusses the relaxation of internal mechanical stresses as a result of ultra-frequency processing of the PT-N-N + GAAS test structure. It is shown that the relaxation processes in the system under study are not of thermal origin.
Process, structure, stress, processing, result
Короткий адрес: https://sciup.org/140276228
IDR: 140276228
Список литературы Relaxation of internal - mechanical stresses as a result of ultra-high frequency processing test structure Pt-n-n + GaAs
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