Synthesis of the aperture interference field

Автор: Turukhano Boris Ganyevich, Turukhano Nikulina, Vilkov Evgeny Alexandrovich

Журнал: Компьютерная оптика @computer-optics

Рубрика: Наномасштабные изображения

Статья в выпуске: 2 т.35, 2011 года.

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Synthesis of the aperture interference field in the optical range is described, allowing to write down of unlimited length precision linear and radial holographic diffraction gratings. The method of phase modulation developed by authors has allowed increasing accuracy of phase measurements at synthesis diffraction gratings due to what now are created linear and the angular measuring systems possessing nanoresolution.

Synthesis aperture, interference field, linear and radial holographic diffraction gratings, nanometrology, nanomeasurement systems

Короткий адрес: https://sciup.org/14058997

IDR: 14058997

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