Creating nanosized copper coating as diffraction lenses on a quartz surface
Автор: Nesterenko Dmitriy, Poletayev Sergey, Rasshchepkina Natalya, Kitayeva Victoria
Журнал: Известия Самарского научного центра Российской академии наук @izvestiya-ssc
Рубрика: Физика и электроника
Статья в выпуске: 4-1 т.14, 2012 года.
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Creation of a diffraction binary lens on the basis of galvanic besieged copper for work in a x-ray range of lengths of waves is described. The relief was formed of a layer of the resist put on an initial copper film, by means of electronic lithograph. Experiments showed presence after manifestation of a resist thin, nonconducting a film current on an initial copper surface. It interferes with further galvanic sedimentation of a continuous layer of copper. Therefore, further researches should be directed on working off of a mode of lithograph for the purpose of study of a layer of a resist for full thickness.
Electron beam lithography, diffractive binary lens, electrolysis, plasma etching, electrodeposits
Короткий адрес: https://sciup.org/148201144
IDR: 148201144