The influence of mobile positive charge on electronic conductivity of dielectric with heterogeneous blocking border

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The correlation between the size of a positive mobile charge and electronic conductivity of oxide on polycrystalline silicon is established with the help of experimental method of thermally stimulated polarization and depolarization of MIS-structures. The boundary conditions of a problem for the working model of behavior of a mobile charge in isolating layers generated on a rough semiconductor film are formulated.

Mobile charge of a dielectric, heterogeneous blocking border between a dielectric and a semiconductor, oxide on polycrystalline silicon

Короткий адрес: https://sciup.org/148176108

IDR: 148176108

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