THE EFFECT OF SPECKLE FIELDS ON MEASUREMENT RESULTS WHEN MONITORING A DEFORMED SURFACE WITH A LOW-COHERENCE INTERFERENCE INSTALLATION

The paper considers the influence of speckle fields on the formation of the amplitude of the interference signal when monitoring a deformed surface using a low-coherence light interference installation. Interference devices operating in low-coherence light use white light sources, superluminescent diodes, which coherence length ranges from 100 microns to 1 micron. The coherence length of the radiation source is a key parameter of these devices, since the shorter the coherence length, the higher the accuracy of measuring the microrelief of the surface; therefore, this work is relevant and promising. The article sets the purpose and objectives of the study, considers the properties of speckle fields, and proposes an interference control method using partially coherent radiation. During the experiment, the amplitude of the output signal and expressions for the amplitude of the interference signal were analyzed, which made it possible to evaluate the functioning and change of parameters introduced into the optical circuit of the measuring installation