Effect of elastic stresses on the formation of structural defects in semiconductors
Автор: Loginov Yu. Yu., Mozsherin A.V., Brilikov A.V.
Журнал: Сибирский аэрокосмический журнал @vestnik-sibsau
Рубрика: Технологические процессы и материалы
Статья в выпуске: 2 (48), 2013 года.
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The structural defects formation in semiconductors CdTe, HgTe, ZnTe, ZnSe, ZnS, Si and GaAs were investigated by method of transmission electron microscopy. It is found that the same processing conditions in semiconductors А2В6 defects are formed with largest dimensions and higher density as compared with Si and GaAs. The degree of crystallattice irregularities and defect formation intensity decreases in the following order of ZnS → ZnSe ≈ CdS → CdTe ≈≈ HgTe → ZnTe to GaAs and Si. The experimental results are explained on the basis of analysis of the elastic stressesin the material generated as a result of the formation of structural defects.
Structural defects, elastic constants, electron microscopy, semiconductors
Короткий адрес: https://sciup.org/148177059
IDR: 148177059