ITO thin films parameters dependence on deposition conditions
Автор: Luniakina T.A.
Журнал: Форум молодых ученых @forum-nauka
Статья в выпуске: 5-2 (21), 2018 года.
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The article describes ITO thin films, their properties, application and production methods. Based on various studies, there was analyzed the dependence of ITO films deposition main parameters on modes and film formation technology.
Thin film, пленка ito, vacuum, film thickness, deposition mode, ito, deposition, sputtering speed
Короткий адрес: https://sciup.org/140282751
IDR: 140282751
Статья научная
