Development and applications of MEMS components
Автор: Levitskiy Alexey A., Marinushkin Pavel S.
Журнал: Журнал Сибирского федерального университета. Серия: Техника и технологии @technologies-sfu
Статья в выпуске: 3 т.8, 2015 года.
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This article provides the results of the MEMS (MicroElectroMechanical Systems) components studies. The design considerations and manufacturing techniques of the silicon-based MEMS components are considered. Results of the experimental characterization of the fabricated prototypes are provided. Furthermore, discussion related to the future development of the MEMS components is also presented.
Microelectromechanical systems (mems), microelectromechanical resonators, scream technology, microgyroscopes, inertial navigation, pedestrian navigation, scream-технология
Короткий адрес: https://sciup.org/146114953
IDR: 146114953
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