Response features of the gas sensor resistive in flow mode

Presented are experimental results of investigation of gas flow velocity influence on the sensitive layer resistance of the resistive semiconductor sensor under condition of heater thermo stabilization and sensor design when heater and sensitive layer are on the opposite sides of the dielectric substrate. It is shown, that change in sensor sensitive layer resistance caused by flow velocity changes under condition of constant heater temperature repeats the character of temperature dependence of sensor sensitive layer resistance in a constant flow. Influence of the observed dependences for the results of the ozone concentration measurements is discussed.