The problem of destroying conducting thin-film structures in integral microscircuits under the influence of microwave radiation

The article discusses the problem of the destructibility of conductive thin-film structures under the influence of microwave electromagnetic radiation. A number of studies have been carried out on the effect of microwave radiation on metal-dielectric structures with flexible substrates made of lavsan and fluoroplastic, and aluminum deposition with a thickness of 10 to 30 nanometers. The research results showed the process of degradation of film spraying, as well as thermal destruction of substrates under the influence of electromagnetic radiation. A comparative analysis of the obtained experimental data was also carried out.