The development of a source of gaseous ions’ ribbon beams for modification of roll materials

The operating principle, design, and test results of a source of gaseous ions’ ribbon beam are described. The source was based on non-self-sustained gas glow discharge of low pressure supported by emission of grid stabilized plasma cathode. Beams of gaseous ions (N 2, Ar, O 2 and their mixes) were generated in pulse-periodic mode (5-1000 Hz, 0.25-0.5 ms). Beams cross section made 650x80 mm 2. Ions energy was adjusted within the range 15-40 keV, the average beam current being 0.5-200 mА, the heterogeneity of current density distribution along the large axis of beam cross-section being ~10%. The source operated under pressures 0.03-0.07 Ра provided by diffusion pump. High reliability and large resource of the ion source are caused by the use of plasma cathode based on glow discharge in its discharge system.