High Accuracy Swin Transformers for Image-based Wafer Map Defect Detection

High Accuracy Swin Transformers for Image-based Wafer Map Defect Detection

Автор: Thahmidul Islam Nafi, Erfanul Haque, Faisal Farhan, Asif Rahman

Журнал: International Journal of Engineering and Manufacturing @ijem

Статья в выпуске: 5 vol.12, 2022 года.

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A wafer map depicts the location of each die on the wafer and indicates whether it is a Product, Secondary Silicon, or Reject. Detecting defects in Wafer Maps is crucial in order to ensure the integrity of the chips processed in the wafer, as any defect can cause anomalies thus decreasing the overall yield. With the current advances in anomaly detection using various Computer Vision Techniques, Transformer Architecture based Vision models are a prime candidate for identifying wafer defects. In this paper, the performance of Four such Transformer based models – BEiT (BERT Pre-Training of Image Transformers), FNet (Fourier Network), ViT (Vision Transformer) and Swin Transformer (Shifted Window based Transformer) in wafer map defect classification are discussed. Each of these models were individually trained, tested and evaluated with the “MixedWM38” dataset obtained from the online platform, Kaggle. During evaluation, it has been observed that the overall accuracy of the Swin Transformer Network algorithm is the highest, at 97.47%, followed closely by Vision Transformer at 96.77%. The average Recall of Swin Transformer is also 97.54%, which indicates an extremely low encounter of false negatives (24600 ppm) in contrast to true positives, making it less likely to expose defective products in the market.

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Wafer defects, Transformer models, Machine learning, Swin transformer model

Короткий адрес: https://sciup.org/15018591

IDR: 15018591   |   DOI: 10.5815/ijem.2022.05.02

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