Low-coherence interferometry of stratified structures using polychromatic light and digital interferogram recording and processing

Forming of polychromatic interference patterns during the measurements of stratified structures surface geometry and recording of these patterns by means of digital cameras are discussed. Formulas for intensity distribution in interference pattern depending on surface relief and object structure are received. The distinct feature of these formulas is the dependence of theirs on spectral properties of photodetectors array. Results of numerical simulation of interference fringes in polychromatic light and experimental digital white-light microinterferograms are presented. These results demonstrate an accordance of theoretical model with experimental interferograms and potential for solving of inverse problem of low-coherence interferometry using numerical simulation of interference pattern.