Predictive model for control of reflecting mirrors in the projection optics of a maskless lithographer

This article discusses the nonlinear control function of reflecting mirrors and lists its advantages and disadvantages. A method for controlling reflective mirrors in the projection optics of a maskless lithograph using a prediction model is considered. The predictive control model can be implemented based on a differential equation that describes the dynamics of mirror rotation. A recurrence relation is calculated to calculate the predicted position of the mirror in the next step.