Active metamaterial on the base of integral NEMS-structures

The conception of integrated nanoelectromechanical systems (NEMS) formation method is considered. The method is based on original combination of self-organizing and self-aligning processes. The functionality of proposed NEMS-structures and possible applications of nanomaterial which constituted by two-dimensional array of such structures are discussed. The results of experiments directed to proposed NEMS-technology realization are led.