Investigation of high-frequency power absorption in a dense plasma column
Автор: Hussein A.M.
Журнал: Мировая наука @science-j
Рубрика: Основной раздел
Статья в выпуске: 7 (16), 2018 года.
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The article is devoted to the study of high-frequency power absorption in a dense plasma column, with parameters characteristic of inductively coupled plasma. To determine the high-frequency power, the solution of boundary-value problem for Maxwell equations is used. As a mechanism for HF field energy dissipation, absorption is taken into account due to collisions and Landau damping. It is found out that the value of local HF power entering the electronic component of plasma affects the electron temperature and, as a consequence, the local ionization rate, which determines plasma density evolution.
Plasma, power, frequency, induction source, hf
Короткий адрес: https://sciup.org/140289151
IDR: 140289151
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